Nano-scale surface modification of materials with slow, highly charged ion beams
نویسندگان
چکیده
منابع مشابه
Nanoscopic surface modification by slow ion bombardment
We present systematic scanning tunneling microscopy (STM)/atomic-force microscopic (AFM) investigations on nanoscopic defect production at atomically clean surfaces of SiO2, Al2O3 and highly oriented pyrolytic graphite (HOPG) after bombardment by slow (impact energy ≤ 1.2 keV) singly and multiply charged ions under strict ultra-high vacuum (UHV) conditions. Combined STM and AFM studies show tha...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2007
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.060